OVERVIEW

The Keithley 6517B Electrometer/High Resistance Meter is the standard for sensitive measurements in research laboratories worldwide. Keithley has over 60 years of expertise in low-current measurements. The Keithley electrometer can reliably measure currents as low as 10 aA (10×10⁻¹⁸ A), charges as low as 1 fC, and supports resistance measurements up to 10¹⁸ Ω. The 6517B can also measure a maximum voltage range of up to 200 V with an input impedance of over 200 TΩ. All these capabilities are integrated into a single instrument that is as easy to operate as a digital multimeter.

Main Features

• Measure resistance up to 10¹⁸ Ω

• 10 aA (10×10⁻¹⁸ A) current measurement resolution

• The combination of the 6517B, 8009 Resistivity Test Fixture, and KickStart High Resistivity Application provides a complete hardware and software solution for ASTM D257 high-resistivity measurements

• <3 fA input bias current

• 6 1/2 -digit high-accuracy measurement mode

• <20 μV voltage drop on the lowest current range

• Up to 200 V voltage measurement, >200 TΩ input impedance

• Built-in ±1000 V voltage source

• Unique high-resistance measurement method with electrode voltage source switching

• Built-in test sequences support four different device characterization tests, surface and bulk resistivity, surface insulation resistance, and voltage sweeps

• Optional plug-in scanner cards allow testing up to 10 devices or material samples with a single test setup

• GPIB and RS-232 interfaces